Correlative AFM/SEM Microscopy Platform

Why FusionScope?

Discover the FusionScope difference.

The only AFM that offers SEM Imaging, EDS Elemental Analysis, and Nanoprobing technology all within the same correlative microscopy platform!

AFM with SEM

Using Profile View, the AFM tip can be precisely positioned on the pore-like structures observed on the surface of metal films allowing for repeatable diameter and depth measurement of the same structure.

AFM with EDS

Elemental data overlayed onto AFM topographical information results in the identification of features difficult to observe visually, such as those in superconducting filaments.

AFM with Nanoprobing

Through precise navigation of nanoprobers and the AFM tip in Profile View, localized electrical information can be obtained of samples and devices under operation.