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MVSystem

MV Systems

MVSystems is a global provider of state-of-the-art thin film deposition systems and technology for the semiconductor sector. Our systems enable our customers to transform today’s ideas into tomorrow’s products.

We design, build and deliver ultra-high vacuum (UHV) single and multi-chamber deposition systems for R&D, prototype production and small production lines. As part of the systems sale, we specifically guarantee state of the art opto-electronic properties of thin film semiconductors such as amorphous and nanocrystalline silicon, dielectrics (e.g. SiNx and SiOx) and transparent conductive oxides (TCOs).

 

R&D Single and Dual Chambers

Single and dual chamber systems are low cost options for R&D work on semiconductor fabrication and materials science applications. Our systems have a small footprint, are simple to operate and are available for a variety of processes as described below.

Vacuum : High vacuum (HV) or Ultra-high vacuum capability (UHV available with load lock option only). (more details)

 

 

Cluster Tool for R&D

Cluster tools eliminate cross-contamination in multi-layer thin film structures and allow the production of high-quality electronic devices. Each MVSystems module as described below is controlled independently allowing simultaneous deposition in all chambers.

Vacuum: Ultra-high vacuum (UHV). (more details)

 

 

Cluster Tool for Prototyping

Cluster tools eliminate cross-contamination in multi-layer thin film structures and allow the production of high-quality electronic devices. Each MVSystems module as described below is controlled independently allowing simultaneous deposition in all chambers.

 

Vacuum: High vacuum (HV). (more details)

 

Roll to Roll Single Chamber

The MVSystems roll to roll system consists of a standalone chamber with two deposition zones. Sputtering and evaporation are the standard deposition methods available but other deposition processes may be incorporated. Designed for depositing thin film materials on flexible substrates. (more details)

 

 

 

PT. Era Mitra Perdana
Head Office - Jakarta
Ruko Buaran Persada No. 31
Jl. R. Soekamto Duren Sawit Jakarta 13450, Indonesia 
Telp: +61-21-86612458; Fax: +62-21-86612365
E-mail: sales@eramitra.co.id
Surabaya Office
Jl. Kebon Sari V No. 7G - Surabaya ; Telp : 0878 5341 2772